Dry Vacuum Pump (LR/HR/UR Series) by ULVAC Incorporation

ULVAC's unique approach to utilize the generated heat from within the dry pump body allows the LR/HR/UR series to perform even in the most stringent processes. ULVAC has focused the design efforts..

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Product Description

ULVAC's unique approach to utilize the generated heat from within the dry pump body allows the LR/HR/UR series to perform even in the most stringent processes. ULVAC has focused the design efforts into maintaining an extremely uniform high temperature throughout all pump stages making this series pump optimal for CVD and Etch applications. ULVAC's ECO-SHOCK can be added to the LR/HR/UR pump for additional energy savings of up to 70% for any light processes including pumping air or nitrogen.

Product Specification

Specification Value
Power Source Electric
Type dry Pump
Condition New
Valve Type Oil Free

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