Integrated Systems And Sub-Fab Solutions by Edwards India

Our completely integrated and flexible vacuum and abatement solutions will ensure a safe operation in hazardous processes, and reduce overall your operating costs.

We are dedicated to providing the optimum solutions for semiconductor processes, and our expertise in sub-fab solutions is unrivaled. Our global applications expertise ensures each system provides the optimum hardware and software, best vacuum and exhaust management practices, suitable ancillary equipment, delivering the ideal installation with the most reliable operation.

All of our integrated systems have been designed based on global experience. We are leaders in vacuum and abatement, so we know what works. We constantly innovate and improve what we do because you demand excellence from Edwards.

EUV

Our fully integrated pump and abatement systems will bring significant benefits to EUV lithography manufacturing. Our innovative leading technology solutions and systemisation capabilities will bring improved process up-time, yield, throughput and safety compliance whilst striving to balance the often conflicting requirements of:

• Lower cost of ownership through reduction in consumables usage (electrical power, fuel gas, nitrogen and cooling water),
• Reduced environmental emissions (noise, vibration, sub-fab particles, waste gas and waste water),
• Extended product lifetimes and reduction in on-going service costs.

EZENITH

EZENITH offers an advanced portfolio of systems providing fully integrated vacuum and exhaust management solutions for all of your semiconductor processes applications. EZENITH systems are unique in offering:

• Process-Centric Vacuum & Exhaust Management
• Complete Integration of Components
• Support of each function with a powerful, Integrated Control Interface
• Designed for Efficient use of Space - for Savings of up to 70%
• Full Internal Distribution, regulation and monitoring of services reducing utility hook-up by over 60% while ensuring smooth and reliable operation

 With just a pump and a gas abatement device, you still are not ready to run your process. You will need to connect the pump exhaust, connect up your line heaters where required, run your water, purge and electrical lines, and then get all of your control signals ready. You will also have to consider double-enclosure, gas leak detection, and how you want to conduct leak checks after your tool maintenance. All of these things will cost you design time and money. We understand the problem so we have developed integrated, process-specific solutions. 

 Our integrated systems are already pre-designed for most semiconductor processes. The exhaust heaters are set for the correct temperature to minimize cost and maximise up-time. We put leak check ports and gate valves where they are required. The whole system is enclosed and, most importantly, you only need to provide one of each of the required utilities. We distribute the gases, water, electricity, and control signals where they are needed and create a ready-to-go system.